Setcas plasma cleaners are versatile plasma cleaning tools to remove contamination from the surface of samples such as plastic packages, wafers and glass slides in sample preparation and device fabrication. Our systems also can be used for photoresist ashing, ink removal, surface activation and wettability improvement.
 
The Plasma-I is low cost high performance laboratory plasma cleaner. It is fully automatic system with a touch panel.
 
Specifications:
RF power: 1-200W continuously adjustable
Frequency: 13.56MHz
Quartz tube diameter: 150mm
Ultimate vacuum: 2pa
Gas path: 3 way
Pump power control: panel control